SEMI STANDARDS (Semiconductor Equipment and Materials Institute, Incorporated standards). These standards, published since 1977, recommend unification of standards for equipment and materials required, SEMI - Semiconductor Equipment and Materials Institute, mitteametlikud (de facto) standardid, mida kasutatakse pooljuhtseadiste tööstuses, Pooljuhtide Tööstuse Seadmete ja Materjalide Instituut