mõõteseade objekti pinna kõrguse mõõtmiseks, kasutades spektraal-lairibaühendusega koherentsuse skaneerimise interferomeetriat ehk nn „valge valguse“ valgustust
device for performing surface height measurements of an object using coherence scanning interferometry with spectrally-broadband, "white light" illumination
Valgevalguse skanner kogub intensiivsusandmeid mitmes punktis piki vertikaaltelge ning määrab pinna asukoha, kasutades valge valguse interferogrammi kuju, interferogrammi lokaalset faasi või nende mõlema kombinatsiooni.
White light scanner capture intensity data at a series of positions along the vertical axis, determining where the surface is located by using the shape of the white-light interferogram, the localized phase of the interferogram, or a combination of both shape and phase.
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